Th. S. Dhahi, U. Hashim, N.M. Ahmed, A. Mat Taib. O2 PLASMA BASED SIZE REDUCTION FOR NANO ELECTRONICS  DEVICE FABRICATION. Solid State Sci. Technol. 2026;19(1):114-126. Accessed July 26, 2026. https://journal.massmalaysia.org/ojs/index.php/ssst/article/view/392