OTHMAN, Noraini; ISMAIL, Nur Syakimah; SHIANG, L.Z. OPTIMIZATION OF NITRIDE DEPOSITION PROCESS USING TAGUCHI METHOD . Solid State Science and Technology, [S. l.], v. 18, n. 1, p. 251–254, 2026. Disponível em: https://journal.massmalaysia.org/ojs/index.php/ssst/article/view/515. Acesso em: 30 jul. 2026.