TH. S. DHAHI; U. HASHIM; N.M. AHMED; A. MAT TAIB. O2 PLASMA BASED SIZE REDUCTION FOR NANO ELECTRONICS  DEVICE FABRICATION. Solid State Science and Technology, [S. l.], v. 19, n. 1, p. 114–126, 2026. Disponível em: https://journal.massmalaysia.org/ojs/index.php/ssst/article/view/392. Acesso em: 27 jul. 2026.