EFFECT OF SUBSTRATE BIAS ON THE OPTICAL, BONDING AND ELECTRICAL PROPERTIES OF a-CNx DEPOSITED BY rf PECVD

Authors

  • M. Othman The Solid Sate Physics Laboratory, Physics Department, University of Malaya, 50603, Kuala Lumpur. Author
  • R. Ritikos The Solid Sate Physics Laboratory, Physics Department, University of Malaya, 50603, Kuala Lumpur. Author
  • S.M.A. Gani The Solid Sate Physics Laboratory, Physics Department, University of Malaya, 50603, Kuala Lumpur. Author
  • S.A. Rahman The Solid Sate Physics Laboratory, Physics Department, University of Malaya, 50603, Kuala Lumpur. Author
  • M.R. Muhamad The Solid Sate Physics Laboratory, Physics Department, University of Malaya, 50603, Kuala Lumpur. Author

DOI:

https://doi.org/10.66514/

Abstract

Hydrogenated amorphous carbon nitride (a-CNx:H) thin films were deposited using rf PECVD technique. The effects of negative dc substrate biasing on formation of these films were studied. UV-Vis-NIR spectroscopy was used to obtain the deposition rate (D) and optical energy gap (E04). Bonding properties were studied by means of FTIR spectroscopy while the I-V characteristics were measured by using two probes I-V. The results show a significant change in deposition at a substrate bias of -120 V with an increase in the deposition rate and E04. Effects of the substrate biasing on the optical, bonding and electrical properties are discussed.

Downloads

Published

18-04-2026

Issue

Vol. 18 No. 2 (2010): Solid State Science and Technology

Section

Articles

License

Copyright (c) 2026 Solid State Science and Technology

Creative Commons License

This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.