STRUCTURAL PROPERTIES STUDY OF ZnO THIN FILM PREPARED BY SOL-GEL METHOD WITH VARIOUS ANNEALING TEMPERATURE

Abstract

ZnO thin films were fabricated by the sol-gel method using zinc acetate (Zn(CH3COO) 2.2H2O) as starting material. A homogenous and stable solution was prepared by dissolving the zinc acetate in a solution of ethanol and ethanolamine. Deposition of ZnO solution on Si substrate was performed by spin-coating technique and annealed at various temperatures from 200°C to 600°C. The surface morphologies and structural properties of the obtained product were investigated by scanning electron microscopy (SEM) and X-ray diffraction (XRD). SEM analysis showed that the surface boundaries of ZnO thin films were decreased with the increasing of annealing temperature. X-ray analysis showed that the crystallinity of ZnO thin films increased with increasing annealing temperature. The effect of annealing temperature of ZnO thin films was studied.