ANNEALING EFFECTS ON ELECTRICAL CHARACTERISTICS OF GaAs IMPLANTED WITH 100 MeV 56Fe and 120Sn IONS
DOI:
https://doi.org/10.66514/Abstract
Single crystal n-GaAs substrates have been implanted at room temperature with 70 MeV 56Fe and 120Sn ions to a fluence of 1x1018 ions/m2. The electrical characteristics were investigated after implantation and annealing up to 850 °C by current voltage measurements. Low temperature resistance measurements of these samples show that the 56Fe implanted samples annealed to 350 °C and 120Sn implanted samples annealed to 450 °C are dominated by a variable range hoping conduction, whereas for the 56Fe implanted samples annealed to 450 °C and 550 °C and 120Sn implanted samples annealed to 550 °C and 650 °C the electrical conduction is due to hoping between neighboring defect sites.
Downloads
Published
Issue
Section
License
Copyright (c) 2007 Solid State Science and Technology

This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.
