SYNTHESIS OF CARBON NANOTUBES BY MICROWAVE ASSISTED PLASMA DEPOSITION (MAPCVD) TECHNIQUE

Abstract

Microwave Plasma has been used to synthesis carbon nanotubes (CNT) in the hydrogen and methane environment on the Si substrate. RF sputtering is used for applying nickel catalyst surface of the substrate. Scanning Electron Microscope (SEM) analysis revealed the formation of tubular structure of the deposits, while High Resolution Transmission Electron Microscope (HRTEM) analysis revealed the structure of multiwalled CNT.