UV-VIS CHARACTERIZATION OF DIAMOND-LIKE CARBON THIN FILMS DEPOSITED USING (DC-PECVD)

Authors

  • Bakar Ismail Physics Department, Faculty of Science, Universiti Teknologi Malaysia 81310 Skudai, Johor, Malaysia Author
  • Nur Alifah Ab Rahman Physics Department, Faculty of Science, Universiti Teknologi Malaysia 81310 Skudai, Johor, Malaysia Author
  • Bibi Aishah Roslan Physics Department, Faculty of Science, Universiti Teknologi Malaysia 81310 Skudai, Johor, Malaysia Author
  • R. Hussin Physics Department, Faculty of Science, Universiti Teknologi Malaysia 81310 Skudai, Johor, Malaysia Author
  • Karim Deraman Physics Department, Faculty of Science, Universiti Teknologi Malaysia 81310 Skudai, Johor, Malaysia Author
  • Wan Nurul Huda Wan Shamsuri Physics Department, Faculty of Science, Universiti Teknologi Malaysia 81310 Skudai, Johor, Malaysia Author

Keywords:

Diamond-like carbon, optical properties

Abstract

Optical properties of Diamond-like Carbon Thin Films deposited by DC-PECVD are reported. The films were deposited on the corning glasses with the ratio of Hydrogen, H2 (97%) and Methane, CH4 (3%) and grew diamond like carbon (DLC) thin films with different temperatures up to 873K. The other important variables were fixed such as DC voltage (1.5 kV) and pressure (1 x 10-1 torr). From the light transmission using UV-Vis spectroscopy it was found that the type of optical transition is allowed indirect transition in the range of 3.8eV to 4.3eV. The thickness decreases with the increases of substrate deposition temperature. The photoluminescence analysis was order to obtain the peak of excitation and emission range of the sample films. It has been found that the transition energy in the range of 3.06 to 3.22 eV.

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Published

14-06-2026

Issue

Vol. 19 No. 2 (2011): Solid State Science and Technology

Section

Articles

License

Creative Commons License

This work is licensed under a Creative Commons Attribution 4.0 International License.