MARYAM ALSADAT RAD; KAMARULAZIZI IBRAHIM. EFFECT OF OXYGEN ADDITION ON SIDEWALLS OF SILICON SQUARE MICRO-PIT ARRAYS USING SF6 BASED REACTIVE ION ETCHING. Solid State Science and Technology, [S. l.], v. 20, n. (1&2), p. 68–74, 2026. Disponível em: https://journal.massmalaysia.org/ojs/index.php/ssst/article/view/634. Acesso em: 27 jul. 2026.