ENHANCEMENT OF NANO AND MICRO PHOTONICS LITHIUM NIOBATE VIA SPIN- COATING TECHNIQUE FOR OPTICAL WAVEGUIDE APPLICATIONS

Authors

  • Makram A. Fakhri Institute of Nano Electronic Engineering, University Malaysia Perlis UniMAP, 01000 Kangar, Perlis, Malaysia Author
  • Y.Al-Douri Institute of Nano Electronic Engineering, University Malaysia Perlis UniMAP, 01000 Kangar, Perlis, Malaysia Author
  • U. Hashim Institute of Nano Electronic Engineering, University Malaysia Perlis UniMAP, 01000 Kangar, Perlis, Malaysia Author

Keywords:

Component, Lithium Niobate, Nanophotonic device, Optical waveguide

Abstract

Lithium niobate (LiNbO3) nano and micro photonics structures are deposit on glass substrate by spin-coating technique. LiNbO3 are deposited at 3000 rpm for 30 sec and annealed at 400, 500, 600 oC, respectively. They are characterized and analyzed by scanning electron microscopy (SEM) and Ultre-Violet visible (UV-vis). The measured results have showed that at increasing of annealing temperature, the structures start to be more crystallized and be more homogenize until optimum structure applicable for optical waveguides then start to be less in crystallization and not homogeneous.

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Published

20-01-2026