ENHANCEMENT OF NANO AND MICRO PHOTONICS LITHIUM NIOBATE VIA SPIN- COATING TECHNIQUE FOR OPTICAL WAVEGUIDE APPLICATIONS
Keywords:
Component, Lithium Niobate, Nanophotonic device, Optical waveguideAbstract
Lithium niobate (LiNbO3) nano and micro photonics structures are deposit on glass substrate by spin-coating technique. LiNbO3 are deposited at 3000 rpm for 30 sec and annealed at 400, 500, 600 oC, respectively. They are characterized and analyzed by scanning electron microscopy (SEM) and Ultre-Violet visible (UV-vis). The measured results have showed that at increasing of annealing temperature, the structures start to be more crystallized and be more homogenize until optimum structure applicable for optical waveguides then start to be less in crystallization and not homogeneous.
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